| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16b.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnK2Y/S9juv |
| Repository | sid.inpe.br/mtc-m17@80/2007/11.13.13.22 |
| Last Update | 2007:12.10.17.48.27 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m17@80/2007/11.13.13.22.37 |
| Metadata Last Update | 2018:06.05.03.35.01 (UTC) administrator |
| Secondary Key | INPE-15051-PRE/9961 |
| ISSN | 0021-8979 |
| Citation Key | DiazAbrCasUedReu:2007:StPr00 |
| Title | Strain profile of (001) silicon implanted with nitrogen by plasma immersion  |
| Year | 2007 |
| Month | May |
| Access Date | 2024, May 18 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 135 KiB |
| 2. Context | |
| Author | 1 Diaz, Beatriz 2 Abramof, Eduardo 3 Castro, Ruy Moirgado de 4 Ueda, Mário 5 Reuther, H. |
| Resume Identifier | 1 2 8JMKD3MGP5W/3C9JGUH |
| Group | 1 LAS-INPE-MCT-BR 2 LAS-INPE-MCT-BR 3 LAS-INPE-MCT-BR 4 LAP-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Res Ctr Rossendorf, Inst Ion Beam Phys & Mat Res |
| Journal | Journal of Applied Physics |
| Volume | 101 |
| Number | 10 |
| Pages | No. 103523 |
| History (UTC) | 2007-12-10 17:48:27 :: simone -> administrator :: 2008-06-29 02:36:53 :: administrator -> simone :: 2011-05-18 22:24:31 :: simone -> administrator :: 2012-10-23 23:58:47 :: administrator -> simone :: 2007 2013-02-20 15:20:02 :: simone -> administrator :: 2007 2018-06-05 03:35:01 :: administrator -> marciana :: 2007 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | -RAY-DIFFRACTION ION-IMPLANTATION MICROSTRUCTURAL CHARACTERIZATION ROCKING CURVES DIFFUSION SI CRYSTALS DOPANT DAMAGE |
| Abstract | In this work, we investigate the strain and defect state of silicon implanted with nitrogen by plasma immersion ion implantation, with doses between 4.5x10(16) and 8.7x10(16) cm(-2). For this purpose, we have used Auger electron spectroscopy, x-ray reflectivity, and high-resolution x-ray diffraction. Auger spectra showed that nitrogen concentration profiles broaden and shift deeper into the substrate as the dose increases. High oxygen concentration in the first 20 nm suggested the presence of an amorphous oxide layer at the sample surface, which was confirmed by x-ray reflectivity measurements. Reciprocal space maps revealed a tensile strain perpendicular to the surface, while no in-plane strain was detected. Since no significant diffuse scattering was found, randomly distributed point defects must be predominant in the strained region compared to large displacement field defects such as clusters and dislocations. omega/2 theta scans around (004) Bragg reflection were fitted using dynamical theory of x-ray diffraction. The strain profiles obtained from the best fits correlated well with nitrogen concentration depth profiles, signaling interstitial nitrogen as the main source of strain. (c) 2007 American Institute of Physics. |
| Area | FISMAT |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Strain profile of... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Strain profile of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| data URL | http://mtc-m16b.sid.inpe.br/ibi/6qtX3pFwXQZGivnK2Y/S9juv |
| zipped data URL | http://mtc-m16b.sid.inpe.br/zip/6qtX3pFwXQZGivnK2Y/S9juv |
| Language | en |
| Target File | strain profile.pdf |
| User Group | administrator simone |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | allowpublisher allowfinaldraft |
| Read Permission | allow from all |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/bibdigital/2013/09.25.21.49 1 sid.inpe.br/bibdigital/2013/09.24.19.30 1 sid.inpe.br/mtc-m21/2012/07.13.14.44.57 1 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | lcp.inpe.br/ignes/2004/02.12.18.39 cptec.inpe.br/walmeida/2003/04.25.17.12 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |